Title:
加工装置
Document Type and Number:
Japanese Patent JP7382833
Kind Code:
B2
Abstract:
A processing apparatus includes a processing feed unit and a control unit. The processing feed unit moves a holding unit along guide rails between a processing zone, and an imaging zone in which a workpiece is imaged by a camera. The control unit includes a correction amount calculation section configured such that, after forming a cut groove in the workpiece, the cut groove is imaged by the camera, and correction values in a Y-axis direction or a correction angle for the chuck table are or is then calculated from Y-coordinates of two points apart from each other in a processing feed direction on the cut groove, whereby when carrying out processing feed of the chuck table in the imaging zone, the camera is corrected in position in the Y-direction based on the correction values or the chuck table is rotated by the correction angle.
Inventors:
Yoshimasa Kojima
Makoto Naka
Satoshi Hanashima
Makoto Naka
Satoshi Hanashima
Application Number:
JP2020000538A
Publication Date:
November 17, 2023
Filing Date:
January 06, 2020
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
H01L21/301; B23Q17/24; B24B27/06; B24B47/22; B24B49/12
Domestic Patent References:
| JP201223256A | ||||
| JP1064981A | ||||
| JP2005223270A | ||||
| JP2019186447A | ||||
| JP2017117924A |
Attorney, Agent or Firm:
Sakai International Patent Office