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Title:
離型フィルム
Document Type and Number:
Japanese Patent JP7287273
Kind Code:
B2
Abstract:
A release film satisfies formulas (I) and (II) when S1 (%) represents the maximum dimensional change rate between 30° C. and 150° C. when the temperature is raised from 30° C. to 200° C. at a rate of 10° C./min, T1 (° C.) represents the temperature at which S1 is obtained, and S0 (%) represents the dimensional change rate at 40° C. The surfaces may have a surface free energy Sa (mN/mm) at 25° C., surface free energy Sb (mN/mm) after having been subjected to a heat treatment at 180° C. for 3 minutes, and surface free energy Sc (mN/mm) after having been stretched by 50% at 180° C. that satisfy formulas (III) and (IV).0≤S1≤1.5  Formula (I):0≤|S1−S0|/(T1−40)≤0.050  Formula (II):0≤|Sa−Sb|≤15  Formula (III):0≤|Sa−Sc|≤15  Formula (IV):

Inventors:
Hideo Shoji
Teruya Tanaka
Isao Manabe
Application Number:
JP2019506463A
Publication Date:
June 06, 2023
Filing Date:
December 13, 2018
Export Citation:
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Assignee:
Toray Industries, Inc.
International Classes:
B29C33/68; B32B27/00; H01L21/56
Domestic Patent References:
JP2012224082A
JP2017013455A
JP2017177463A
JP2017205901A



 
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