METHOD AND APPARATUS FOR EXPOSURE OF PRINTED-CIRCUIT BOARD

Title:

METHOD AND APPARATUS FOR EXPOSURE OF PRINTED-CIRCUIT BOARD

Document Type and Number:

Japanese Patent JP2509134

Kind Code:

B2

Abstract:

PURPOSE: To provide a method of exposure of a printed circuit board for accurate pattern transfer.
CONSTITUTION: A film mask F is aligned with a printed circuit board K, and a chuck 10 and holder 20 are joined. Air is blown into a gap G to bulge a film P, so that the film P presses the film mask F against the printed circuit board. As a result, the film mask makes contact with the printed circuit board first in its center and gradually in the whole area. In this state, a light 7 is turned on to carry out exposure.

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Inventors:

TANAKA MINORU
NAGAI AKIRA

Application Number:

JP29808792A

Publication Date:

June 19, 1996

Filing Date:

October 09, 1992

Export Citation:

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Assignee:

ADOTETSUKU ENJINIARINGU KK
KYANON KONHOONENTSU KK

International Classes:

G03F7/20; H05K3/00; (IPC1-7): H05K3/00; G03F7/20

Domestic Patent References:

JP4225360A
JP2262154A
JP1257849A
JP219149U

Attorney, Agent or Firm:

Kiyoshi Takahashi

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