Title:
A substrate temperature control fixing device and a manufacturing method for the same
Document Type and Number:
Japanese Patent JP6017781
Kind Code:
B2
Abstract:
A substrate temperature adjusting-fixing device includes an electro static chuck attracting and holding an object to be attracted; a base plate to which the electro static chuck is fixed; an adhesive layer formed between the electro static chuck and the base plate; and a heat insulation layer formed between the electro static chuck and the base plate, wherein the electro static chuck includes a base body having a mounting surface on which the object to be attracted is mounted, a heat generator directly formed on a surface opposite to the mounting surface of the base body, and an insulating layer formed to cover the heat generator.
Inventors:
Shudai Komatsu
Nagai Koji
Akihiro Kuribayashi
Kazunori Shimizu
Nagai Koji
Akihiro Kuribayashi
Kazunori Shimizu
Application Number:
JP2011267932A
Publication Date:
November 02, 2016
Filing Date:
December 07, 2011
Export Citation:
Assignee:
Shinko Electric Industry Co., Ltd.
International Classes:
H01L21/683; B23Q3/15
Domestic Patent References:
| JP2009267256A | ||||
| JP2000268942A | ||||
| JP2011244011A | ||||
| JP2011049196A | ||||
| JP2009054932A | ||||
| JP2008085283A | ||||
| JP7307377A | ||||
| JP2013511162A |
Foreign References:
| WO2010061740A1 | ||||
| WO2011152620A1 |
Attorney, Agent or Firm:
Tadahiko Ito
Previous Patent: Mouth functional training machine
Next Patent: SUPPORTING DEVICE OF BELT-LIKE PHOTOSENSITIVE BODY
Next Patent: SUPPORTING DEVICE OF BELT-LIKE PHOTOSENSITIVE BODY