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Title:
基板搬送装置及び保持装置
Document Type and Number:
Japanese Patent JP5574553
Kind Code:
B2
Inventors:
South Nobufumi
Warrior Kazuhiro
Application Number:
JP2012526306A
Publication Date:
August 20, 2014
Filing Date:
July 26, 2011
Export Citation:
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Assignee:
ULVAC, Inc.
International Classes:
H01L21/683; B25J9/06; B25J15/06
Domestic Patent References:
JPH0677304A1994-03-18
JPH05315435A1993-11-26
JPH01227453A1989-09-11
JPH0677304A1994-03-18
JPH05315435A1993-11-26
JPH01227453A1989-09-11
JP2006049747A2006-02-16
Attorney, Agent or Firm:
Omori Junichi
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