Title:
A target feed unit, a chamber device, and an extremely purple outdoor daylight generating device
Document Type and Number:
Japanese Patent JP6055017
Kind Code:
B2
Abstract:
A target supply apparatus controls a gas pressure inside a tank storing a liquid target material to be outputted from a nozzle by a pressure of gas supplied from a gas supply having a pressure regulator. The target supply apparatus comprises a gas passage introducing gas supplied from the gas supply into the tank, and a high-precision pressure regulator arranged on the gas passage and regulating a pressure of gas flowing the gas passage. The high-precision pressure regulator is able to regulate pressure with accuracy higher than the pressure regulator.
Inventors:
Takayuki Yabu
Nakano Mao
Hitoshi Nagano
Takanobu Ishihara
Nakano Mao
Hitoshi Nagano
Takanobu Ishihara
Application Number:
JP2015076189A
Publication Date:
December 27, 2016
Filing Date:
April 02, 2015
Export Citation:
Assignee:
Gigaphoton Co., Ltd.
International Classes:
H05G2/00
Domestic Patent References:
| JP2008226462A | ||||
| JP2006306035A | ||||
| JP2008041265A |
Foreign References:
| EP1130302A1 | ||||
| US4052903 | ||||
| US20100233563 |
Attorney, Agent or Firm:
Kenzo Matsuura
Ebisu International Patent Office
Ebisu International Patent Office