Title:
TEACHING JIG, SUBSTRATE PROCESSING DEVICE AND TEACHING METHOD
Document Type and Number:
Japanese Patent JP2018022721
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a technique enabling substrate processing with high quality.SOLUTION: A teaching jig includes: a first plate for determining a substrate mounting position in the front-back direction with respect to a substrate holder for holding the substrate; a second plate for determining the substrate mounting position in the crosswise direction with respect to the substrate holder while being orthogonal to the first plate and movably provided in the front-back direction; and a positioning target pint provided in the first plate.SELECTED DRAWING: Figure 6
Inventors:
WATANABE AKITO
YAMAGUCHI AKIRA
JOHO YASUHIRO
TAKASHIMA KATSUMI
YAMAGUCHI AKIRA
JOHO YASUHIRO
TAKASHIMA KATSUMI
Application Number:
JP2016151203A
Publication Date:
February 08, 2018
Filing Date:
August 01, 2016
Export Citation:
Assignee:
HITACHI INT ELECTRIC INC
International Classes:
H01L21/677; H01L21/31
Attorney, Agent or Firm:
Patent Business Corporation IP Win