Title:
薄膜太陽電池用透明電極、それを用いた薄膜太陽電池用透明電極付き基板および薄膜太陽電池、ならびに薄膜太陽電池用透明電極の製造方法
Document Type and Number:
Japanese Patent JP5719846
Kind Code:
B2
Abstract:
Disclosed are: a transparent electrode having a zinc oxide film wherein initial characteristics and humidity resistance during long-time use coexist; and a thin film solar cell provided with said electrode. The transparent electrode contains a transparent conductive layer mainly made of zinc oxide. The transparent conductive film preferably has the following characteristics: having surface irregularities; a carrier concentration of 9 × 10 19 cm -3 or less; a crystal structure having a (110) preferred orientation; a ratio of a (110) peak intensity to a (002) peak intensity I(110)/I(002) measured by X-ray diffraction being 50 or more; and a crystallite with a (110) orientation has a size of 23 nm or more and 50 nm or less, in a planar direction parallel to a substrate; and 30 nm or more and 60 nm or less, in a planar direction perpendicular to the substrate.
Inventors:
Yuko Tawada
Takashi Fujibayashi
Takashi Fujibayashi
Application Number:
JP2012526361A
Publication Date:
May 20, 2015
Filing Date:
June 07, 2011
Export Citation:
Assignee:
Kaneka Corporation
International Classes:
H01L31/0224
Domestic Patent References:
| JP2004311704A | ||||
| JP2000276943A | ||||
| JP1179891A |
Attorney, Agent or Firm:
Masato Shintaku
Yoshimoto Riki
Yoshimoto Riki