Title:
A zipper table and a polish device
Document Type and Number:
Japanese Patent JP6166958
Kind Code:
B2
Inventors:
Kohei Asai
Application Number:
JP2013121590A
Publication Date:
July 19, 2017
Filing Date:
June 10, 2013
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B24B41/06; B24B55/02; H01L21/304; H01L21/683
Domestic Patent References:
| JP2006068862A | ||||
| JP2002059360A | ||||
| JP2009088073A |
Attorney, Agent or Firm:
Patent Business Corporation Tokyo Alpa Patent Office
Kyoko Kawamura
Isao Sasaki
Ken Kubo
Kyoko Kawamura
Isao Sasaki
Ken Kubo
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