ADAPTABLE PROCESSING ELEMENT FOR A PROCESSING SYSTEM AND A METHOD OF MAKING THE SAME

WIPO Patent Application WO2004108982

A3

An adaptable processing element (50,150-156) having multiple configurations is provided for use in a processing system. The processing element comprises a primary component (182, 200, 202, 230) and at least one detachable component (184, 208, 232). The detachable component can be retained for one configuration and removed for another configuration. The detachable component may include a punch-out or knock-out (210, 214, 216) located, for example on its right-hand side or its left-hand side in order to permit access of a gas supply line to a processing chamber for either a right-hand orientation or a left-hand orientation, respectively. Additionally, for example, the detachable component can be retained or removed to permit flexible use with different size processing chambers. A method of making the processing element having these components is also provided. The method may provide a roughening of one or more exposed surfaces on the processing element to improve the adhesion of materials on these surfaces during processing. The roughening procedure may comprise belt sanding the one or more exposed surfaces to produce surface roughness. The roughness may, for example, be about or in excess of Ra=250 mil.

LAWSON JOHN (US)
ECKERSON RODGER (US)
LANDIS MICHAEL (US)

PCT/US2004/013793

September 29, 2005

May 03, 2004

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TOKYO ELECTRON LTD (JP)
TOKYO ELECTRON ARIZONA INC (US)
LAWSON JOHN (US)
ECKERSON RODGER (US)
LANDIS MICHAEL (US)

C23C14/34; C23C14/56; H01L21/00; (IPC1-7): C23C14/34; C23C14/56; H01L21/00

US5630917A	1997-05-20
US4964617A	1990-10-23
US4915564A	1990-04-10
US5803977A	1998-09-08

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