Title:
AMORPHOUS THIN FILM WITH GOOD ELECTRICAL TRANSPORT PERFORMANCE AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2024/103777
Kind Code:
A1
Abstract:
Disclosed in the present invention is a preparation method for an amorphous thin film with good electrical transport performance. The preparation method comprises the following steps: (1) mixing lanthanum oxide and titanium oxide precursor powders until uniform, then grinding same, pressing a target by using a tablet press, and sintering same at a high temperature in a muffle furnace to obtain a LaTiO3 target material; (2) cleaning and etching a SrTiO3 substrate; (3) placing the LaTiO3 target material and the treated SrTiO3 substrate into a pulse laser deposition system together, and growing a LaTiO3 amorphous thin film under proper conditions; and (4) growing amorphous LaTiO3 thin films with different thicknesses at room temperature in a vacuum environment. It can be seen from a curve in the present invention that the thin film shows metallic properties and has good electrical transport performance.
Inventors:
QIAO LIANG (CN)
RUAN YUE (CN)
LENG HUAQIAN (CN)
DING XIANG (CN)
ZHAO YAN (CN)
RUAN YUE (CN)
LENG HUAQIAN (CN)
DING XIANG (CN)
ZHAO YAN (CN)
Application Number:
PCT/CN2023/104473
Publication Date:
May 23, 2024
Filing Date:
June 30, 2023
Export Citation:
Assignee:
YANGTZE DELTA REGION INSTITUTE OF UNIV OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA HUZHOU (CN)
International Classes:
C23C14/06; C23C14/28
Foreign References:
| CN115652258A | 2023-01-31 | |||
| CN114197048A | 2022-03-18 | |||
| CN113897634A | 2022-01-07 | |||
| CN106591781A | 2017-04-26 | |||
| EP3957775A1 | 2022-02-23 | |||
| JP2011003620A | 2011-01-06 | |||
| KR101547600B1 | 2015-08-28 |
Other References:
LEBEDEV N, STEHNO M; GAUQUELIN N; VERBEECK J; BRINKMAN A; AARTS J: "Inhomogeneous superconductivity and quasilinear magnetoresistance at amorphous LaTiO 3 /SrTiO 3 interfaces", JOURNAL OF PHYSICS: CONDENSED MATTER, INSTITUTE OF PHYSICS PUBLISHING, BRISTOL, GB, vol. 33, no. 5, 3 February 2020 (2020-02-03), Bristol, GB, pages 055001, XP093170157, ISSN: 0953-8984, DOI: 10.1088/1361-648X/abc102
Attorney, Agent or Firm:
SCIHEAD IP LAW FIRM (CN)
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