ANGULAR VELOCITY SENSOR - MATSUSHITA ELECTRIC IND CO LTD

Title:

ANGULAR VELOCITY SENSOR

Document Type and Number:

WIPO Patent Application WO/2002/018875

Kind Code:

A1

Abstract:

An angular velocity sensor enhanced in detection characteristics by using a tuning fork vibrator consisting of a single-crystal piezoelectric material such as quartz. The sensor comprises two sheets of crystal oscillators (20, 30) directly joined for integration in a thickness direction so as to be oriented in a crystal-axis direction that generates mutually-reversed-polarity piezoelectric phenomena in their width direction, and includes a tuning fork vibrator (10) having two tuning fork arms (10a, 10b) and a tuning fork base (10c), wherein detecting electrodes (6, 7, 5, 8) are provided on the inner surfaces and the outer surfaces of both of the tuning fork arms (10a, 10b), and driving electrodes (1, 2) used for the detecting electrodes (5, 6, 7, 8) are provided at the tuning fork arms (10a, 10b) so as to cancel out capacitive coupling from the drive side to the detection side.

Inventors:

HATANAKA MASAKAZU (JP)
OUCHI SATOSHI (JP)
NOZOE TOSHIYUKI (JP)
KAWASAKI SHUSAKU (JP)

Application Number:

PCT/JP2001/007269

Publication Date:

March 07, 2002

Filing Date:

August 24, 2001

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC IND CO LTD (JP)
HATANAKA MASAKAZU (JP)
OUCHI SATOSHI (JP)
NOZOE TOSHIYUKI (JP)
KAWASAKI SHUSAKU (JP)

International Classes:

G01C19/56; (IPC1-7): G01C19/56; G01P9/04

Domestic Patent References:

WO2001044755A1	2001-06-21
WO2001036910A1	2001-05-25

Foreign References:

JP2001208546A	2001-08-03
EP0955519A2	1999-11-10
JPH08304075A	1996-11-22
JPH1038580A	1998-02-13

Other References: