Title:
APPARATUS FOR EXHAUST COOLING
Document Type and Number:
WIPO Patent Application WO/2017/177398
Kind Code:
A1
Abstract:
An exhaust cooling apparatus (117) includes at least one cooling plate (314,412,514,614,814,914) for introducing turbulence to the exhaust flowing within the exhaust cooling apparatus (117). The device (318,518,618,818,918) may be a plurality of fins (320,322,324,326,328), a cylinder (518,618) with a curved top portion (544,644), or a diffuser (824,925) with angled blades (826,926). The turbulent flow of the exhaust within the exhaust cooling apparatus (117) causes particles to drop out of the exhaust, minimizing particles forming in equipment downstream of the exhaust cooling apparatus (117).
Inventors:
DUSTIN W HO (CN)
MICHAEL S COX (US)
BRIAN T WEST (US)
ROGER M JOHNSON (US)
YAN ROZENZON (US)
DINKESH SOMANNA (US)
MICHAEL S COX (US)
BRIAN T WEST (US)
ROGER M JOHNSON (US)
YAN ROZENZON (US)
DINKESH SOMANNA (US)
Application Number:
PCT/CN2016/079153
Publication Date:
October 19, 2017
Filing Date:
April 13, 2016
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
DUSTIN W HO (CN)
DUSTIN W HO (CN)
International Classes:
H01L21/02
Foreign References:
| CN104973603A | 2015-10-14 | |||
| TW201604320A | 2016-02-01 | |||
| TW201536114A | 2015-09-16 | |||
| US5453125A | 1995-09-26 | |||
| CN203779727U | 2014-08-20 |
Attorney, Agent or Firm:
LECOME INTELLECTUAL PROPERTY AGENT LTD. (CN)
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