Title:
BASE GROUNDING DETECTION APPARATUS AND METHOD
Document Type and Number:
WIPO Patent Application WO/2023/125502
Kind Code:
A1
Abstract:
A base (9) grounding detection apparatus and method. A voltage signal acquisition unit (302) acquires a voltage signal of a base (9). A voltage detection unit (304) determines, according to the voltage signal and a preset voltage signal, whether the base (9) is grounded, and when the base (9) is grounded, uses a first signal indicating that the base (9) is grounded as an output signal. During execution of a process, a control unit (306), once receiving the first signal, immediately instructs a semiconductor device to stop executing the process and sends an alarm signal, so that a grounding situation caused by a short circuit between the base (9) and a chamber wall or a lining can be detected in time, thereby avoiding an accident that a current breaks down a wafer and further seriously impacts the electrical performance of the wafer and product quality.
Inventors:
WU QIDONG (CN)
Application Number:
PCT/CN2022/142229
Publication Date:
July 06, 2023
Filing Date:
December 27, 2022
Export Citation:
Assignee:
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO LTD (CN)
International Classes:
G01R31/52; C23C14/54
Foreign References:
| CN114355244A | 2022-04-15 | |||
| CN113430495A | 2021-09-24 | |||
| CN102443770A | 2012-05-09 | |||
| CN105319473A | 2016-02-10 | |||
| CN202898518U | 2013-04-24 | |||
| CN211014592U | 2020-07-14 | |||
| JP2005183444A | 2005-07-07 | |||
| JP2005210134A | 2005-08-04 |
Attorney, Agent or Firm:
TEE&HOWE INTELLECTUAL PROPERTY ATTORNEYS (CN)
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