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Title:
CARBON NANOTUBE AGGREGATE AND PROCESS FOR PRODUCING THE SAME
Document Type and Number:
WIPO Patent Application WO/2006/052009
Kind Code:
A1
Abstract:
A process for producing a carbon nanotube aggregate which comprises: a step in which fine metal particles having a given particle diameter are formed on a substrate; a step in which the fine metal particles are heated in a reducing atmosphere to a given temperature of 300-400°C to reduce the surface; a step in which the fine metal particles are heated in a reaction furnace to a given reaction temperature; and a step in which during the period from initiation of the heating of the fine metal particles to initiation of the growth of carbon nanotubes, an organic-compound vapor is introduced into the reaction furnace so that the time period in which the temperature of the fine metal particles exceeds 450°C is within 600 seconds to thereby grow carbon nanotubes on the fine metal particles.

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Inventors:
TAKI YUSUKE (JP)
SHINOHARA KIYOAKI (JP)
Application Number:
PCT/JP2005/021071
Publication Date:
May 18, 2006
Filing Date:
November 10, 2005
Export Citation:
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Assignee:
NIKON CORP (JP)
TAKI YUSUKE (JP)
SHINOHARA KIYOAKI (JP)
International Classes:
C01B31/02; H01J9/02
Foreign References:
JP2004182581A2004-07-02
JP2004074062A2004-03-11
Other References:
See also references of EP 1810950A4
Attorney, Agent or Firm:
Nagahama, Noriaki (Muraki Bldg. 8th Floor, 2-10-10, Yaesu, Chuo-k, Tokyo 28, JP)
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