Title:
CERAMIC BOARD FOR SEMICONDUCTOR PRODUCTION AND INSPECTION DEVICES
Document Type and Number:
WIPO Patent Application WO/2001/059833
Kind Code:
A1
Abstract:
A ceramic board so designed that a practically uniform temperature distribution can be imparted to its surface for processing a semiconductor wafer on the ceramic board. The ceramic board for semiconductor production and inspection devices is a ceramic board having a conductor on the surface or in the interior of the ceramic board, characterized in that the ceramic board contains oxygen and is in the form of a disk whose diameter exceeds 250 mm and whose thickness is 25 mm or less.
Inventors:
ITO YASUTAKA (JP)
HIRAMATSU YASUJI (JP)
HIRAMATSU YASUJI (JP)
Application Number:
PCT/JP2001/000889
Publication Date:
August 16, 2001
Filing Date:
February 08, 2001
Export Citation:
Assignee:
IBIDEN CO LTD (JP)
ITO YASUTAKA (JP)
HIRAMATSU YASUJI (JP)
ITO YASUTAKA (JP)
HIRAMATSU YASUJI (JP)
International Classes:
H01L21/00; H01L21/68; H05B3/14; H05B3/26; H05B3/28; (IPC1-7): H01L21/68; H01L21/66; H05B3/10; H05B3/16; H05B3/18; H05B3/68; C04B35/00
Foreign References:
| JPH1174064A | 1999-03-16 | |||
| JPH10270540A | 1998-10-09 | |||
| JPH10308348A | 1998-11-17 | |||
| JPH1140330A | 1999-02-12 | |||
| JPH09283607A | 1997-10-31 | |||
| JPH07326655A | 1995-12-12 |
Attorney, Agent or Firm:
Yasutomi, Yasuo (Nishinakajima 5-chome Yodogawa-ku Osaka-shi, Osaka, JP)
Download PDF:
Previous Patent: EVALUATION OF ETCHING PROCESSES IN SEMICONDUCTORS
Next Patent: SEMICONDUCTOR DEVICES
Next Patent: SEMICONDUCTOR DEVICES