Title:
CHARGED PARTICLE BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/179115
Kind Code:
A1
Abstract:
Provided is a charged particle beam device, comprising: a charged particle source that emits a charged particle beam; a boosting electrode disposed between the charged particle source and a sample, the boosting electrode forming a path for the charged particle beam and accelerating/decelerating the charged particle beam; a first magnetic pole piece formed to cover the boosting electrode; a second magnetic pole piece formed to cover the first magnetic pole piece; a first lens coil disposed outside the first magnetic pole piece and disposed inside the second magnetic pole piece, the first lens coil forming a first lens; a second lens coil disposed outside the second magnetic pole piece and forming a second lens; and a control electrode formed between the leading end of the first magnetic pole piece and the leading end of the second magnetic pole piece, the control electrode controlling an electric field formed between the sample and the leading end of the second magnetic pole piece.
Inventors:
HIRANO RYO (JP)
MORISHITA HIDEO (JP)
AGEMURA TOSHIHIDE (JP)
KATANE JUNICHI (JP)
NOMAGUCHI TSUNENORI (JP)
MORISHITA HIDEO (JP)
AGEMURA TOSHIHIDE (JP)
KATANE JUNICHI (JP)
NOMAGUCHI TSUNENORI (JP)
Application Number:
PCT/JP2017/012782
Publication Date:
October 04, 2018
Filing Date:
March 29, 2017
Export Citation:
Assignee:
HITACHI HIGH TECH CORP (JP)
International Classes:
H01J37/12; H01J37/153; H01J37/28
Foreign References:
| JPS57118357A | 1982-07-23 | |||
| JP2014082140A | 2014-05-08 | |||
| JPS63117049U | 1988-07-28 |
Attorney, Agent or Firm:
TODA Yuji (JP)
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