Title:
CHEMICAL FUNCTIONALIZATION NANOLITHOGRAPHY
Document Type and Number:
WIPO Patent Application WO2003053845
Kind Code:
A3
Abstract:
The present invention discloses devices and methods relating to patterning substrates using chemical functionalization. The methods include covering the surface of a substrate with a first plurality of molecules, selecting at least one internal bond from the plurality of molecules, and reacting the at least one internal bond to form at least one second functional group. Either or both of the functional groups can then be further reacted.
Inventors:
WEISS PAUL J (US)
FUNK RAY L (US)
FUNK RAY L (US)
Application Number:
PCT/US2002/026423
Publication Date:
May 06, 2004
Filing Date:
August 19, 2002
Export Citation:
Assignee:
PENN STATE RES FOUND (US)
WEISS PAUL J (US)
FUNK RAY L (US)
WEISS PAUL J (US)
FUNK RAY L (US)
International Classes:
G01Q30/10; G03F7/00; G03F7/16; (IPC1-7): B82B3/00
Domestic Patent References:
| WO1997038802A1 | 1997-10-23 | |||
| WO1997039151A1 | 1997-10-23 | |||
| WO1998058293A2 | 1998-12-23 | |||
| WO2003023517A1 | 2003-03-20 |
Foreign References:
| US5648201A | 1997-07-15 | |||
| EP0506993A1 | 1992-10-07 |
Other References:
GOELZHAESER A ET AL: "CHEMICAL NANOLITHOGRAPHY WITH ELECTRON BEAMS", ADVANCED MATERIALS, VCH VERLAGSGESELLSCHAFT, WEINHEIM, DE, vol. 13, no. 11, 5 June 2001 (2001-06-05), pages 806 - 809, XP001132523, ISSN: 0935-9648
YAN, LIN ET AL., J. AM. CHEM. SOC., vol. 120, 1998, pages 6179 - 6180, XP002273955
WOLLMAN, ERIC W. ET AL., LANGMUIR, vol. 9, 1993, pages 1517 - 1520, XP002273956
MUELLER W T ET AL: "A STRATEGY FOR THE CHEMICAL SYNTHESIS OF NANOSTRUCTURES", SCIENCE, AMERICAN ASSOCIATION FOR THE ADVANCEMENT OF SCIENCE,, US, vol. 268, 14 April 1995 (1995-04-14), pages 272 - 273, XP000673038, ISSN: 0036-8075
CALVERT, JEFFREY M., J. VAC. SCI. TECHNOL. B, vol. 11, no. 6, 1993, pages 2155 - 2163, XP002273957
SAKAKI, JUN-ICHI ET AL., CHEM. PHARM. BULL., vol. 38, no. 8, 1990, pages 2262 - 2264, XP002273958
YAN, LIN ET AL., J. AM. CHEM. SOC., vol. 120, 1998, pages 6179 - 6180, XP002273955
WOLLMAN, ERIC W. ET AL., LANGMUIR, vol. 9, 1993, pages 1517 - 1520, XP002273956
MUELLER W T ET AL: "A STRATEGY FOR THE CHEMICAL SYNTHESIS OF NANOSTRUCTURES", SCIENCE, AMERICAN ASSOCIATION FOR THE ADVANCEMENT OF SCIENCE,, US, vol. 268, 14 April 1995 (1995-04-14), pages 272 - 273, XP000673038, ISSN: 0036-8075
CALVERT, JEFFREY M., J. VAC. SCI. TECHNOL. B, vol. 11, no. 6, 1993, pages 2155 - 2163, XP002273957
SAKAKI, JUN-ICHI ET AL., CHEM. PHARM. BULL., vol. 38, no. 8, 1990, pages 2262 - 2264, XP002273958
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