COATING MACHINE, COATING SYSTEM AND CLEANING METHOD FOR COATING MACHINE

WIPO Patent Application WO/2018/228123

A1

A coating machine, a coating system and a cleaning method for the coating machine. The coating machine (10) comprises a machine stand (1) and a first cleaning device (201). The machine stand (1) comprises a working surface (101), and the first cleaning device (201) is configured to be able to move relative to the working surface (101) to clear away foreign matters on the working surface (101). The coating system (100) comprises the coating machine (10) and a detecting device (5); the detecting device (5) is configured to detect defects of a substrate coated with a photoresist by the coating machine (10) and send a detection result signal to control the movement of the first cleaning device (201) of the coating machine (10). By means of the coating machine, the working surface can be cleaned by using the first cleaning device, so that the phenomenon that a person enters the machine to manually clean the working surface is avoided.

JIANG YONG (CN)
WANG ZHIQIANG (CN)
TANG XING (CN)
LI SHU (CN)
SHEN YANG (CN)
GONG CHAO (CN)

PCT/CN2018/087122

December 20, 2018

May 16, 2018

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BOE TECHNOLOGY GROUP CO LTD (CN)
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO LTD (CN)

B08B1/04; B05C11/00; B08B1/00; B08B3/02; B08B5/02

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CN203508454U	2014-04-02
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CN202591161U	2012-12-12
JPH11281461A	1999-10-15
US6159288A	2000-12-12

LIU, SHEN & ASSOCIATES (CN)

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