COMPOSITE OPTICAL SENSOR UNIT AND OPTICAL DISK INSPECTION DEVICE USING IT

Title:

COMPOSITE OPTICAL SENSOR UNIT AND OPTICAL DISK INSPECTION DEVICE USING IT

Document Type and Number:

WIPO Patent Application WO/2003/010488

Kind Code:

A1

Abstract:

An composite optical sensor unit and an inspecting device using it which can inspect at a time and in combination inspection items such the optical tilt angle, surface deflection, eccentricity, reflectance and appearance of an optical disk, and which comprise a laser beam source LD1, a scanner mirror (13) for distributing a laser beam from the laser beam source at high speed, a first beam splitter (15) for applying laser beams distributed by the scanner mirror vertically onto an object of inspection (16) having a concentric diffraction lattice, a fifth light receiving element PSD for two−dimensional position detection that receives a zero−order diffraction light (19) reflected from the object of inspection via the first beam splitter and detects the light receiving position, and a second light receiving element PD2 for receiving an n−order diffraction light (23) reflected from the object of inspection and detecting a received quantity of light.

Inventors:

ICHIFUJI KATSUMI (JP)

Application Number:

PCT/JP2002/007495

Publication Date:

February 06, 2003

Filing Date:

July 24, 2002

Export Citation:

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Assignee:

HAMAMATSU METRIX CO LTD (JP)
ICHIFUJI KATSUMI (JP)

International Classes:

G01B11/00; G01B11/26; G01B11/30; G01N21/95; G11B7/26; (IPC1-7): G01B11/26; G01B11/00; G01B11/30; G01N21/95; G11B7/26

Foreign References:

US5646415A	1997-07-08
JPH09229650A	1997-09-05
JP2000097675A	2000-04-07
US4632546A	1986-12-30
JPH03106524U	1991-11-05

Other References: