Title:
CONFOCAL OPTICAL APPARATUS
Document Type and Number:
WIPO Patent Application WO/1997/048968
Kind Code:
A1
Abstract:
A confocal optical system is disposed one-dimensionally or two-dimensionally. Reflected light from an object (11, 12) is detected by a photodetector array (4) through a light receiving pin-hole array and the peak processing of the luminous intensity of the light received by the photodetector array is performed to measure the height of the object. If the received luminous intensity of the photodetector array exceeds a luminous power which is fixed within the dynamic range (Vs) of the photodetector array, the peak processing is made ineffective.
Inventors:
TADA SHIGEYUKI (JP)
TANAKA HIROSHI (JP)
ENDOH TAKAYOSHI (JP)
MORIYA MASATO (JP)
TANAKA HIROSHI (JP)
ENDOH TAKAYOSHI (JP)
MORIYA MASATO (JP)
Application Number:
PCT/JP1997/001944
Publication Date:
December 24, 1997
Filing Date:
June 06, 1997
Export Citation:
Assignee:
KOMATSU MFG CO LTD (JP)
TADA SHIGEYUKI (JP)
TANAKA HIROSHI (JP)
ENDOH TAKAYOSHI (JP)
MORIYA MASATO (JP)
TADA SHIGEYUKI (JP)
TANAKA HIROSHI (JP)
ENDOH TAKAYOSHI (JP)
MORIYA MASATO (JP)
International Classes:
G01B11/02; G01B11/24; G02B21/00; (IPC1-7): G01B11/24; G01B11/02; G02B7/09; G03B3/00
Foreign References:
| JPH08152308A | 1996-06-11 | |||
| JPH0413908A | 1992-01-17 | |||
| JPH02145904A | 1990-06-05 | |||
| JPS4838758A | 1973-06-07 | |||
| JPH0961720A | 1997-03-07 |
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