Title:
CONTACTOR CLEANING SHEET, AND CONTACTOR CLEANING METHOD
Document Type and Number:
WIPO Patent Application WO/2002/094508
Kind Code:
A1
Abstract:
A contactor cleaning sheet (10) capable of concurrently cleaning the tip and side faces of a contactor (22) by using one sheet of the cleaning sheet (10), comprising a base sheet (11), a first polishing layer (12) formed on the surface of the base sheet (11), a porous foaming layer (13) having air bubbles therein formed on the surface of the polishing layer (12), and a second polishing layer (14) formed on the surface of the foaming layer (13).
Inventors:
SATO SATORU (JP)
SAKAMOTO AKIHIRO (JP)
SAKAMOTO AKIHIRO (JP)
Application Number:
PCT/JP2002/003494
Publication Date:
November 28, 2002
Filing Date:
April 08, 2002
Export Citation:
Assignee:
NIPPON MICRO COATING KK (JP)
SATO SATORU (JP)
SAKAMOTO AKIHIRO (JP)
SATO SATORU (JP)
SAKAMOTO AKIHIRO (JP)
International Classes:
B08B1/00; B24B19/00; B24B19/16; B24D11/00; B24D15/00; G01R1/06; B24D15/04; B24D18/00; B32B5/18; G01R3/00; G01R31/26; G01R1/067; (IPC1-7): B24D15/04; B24D11/00; H01L21/66; G01R1/06; G01R31/28
Foreign References:
| JPH10339766A | 1998-12-22 | |||
| JPS56119377A | 1981-09-18 | |||
| JPH11337621A | 1999-12-10 | |||
| JP2000332069A | 2000-11-30 |
Other References:
See also references of EP 1391265A4
Attorney, Agent or Firm:
Takeuchi, Sumio (Nishishinbashi 1-Chome Minato-Ku, Tokyo, JP)
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