Title:
CRUCIBLE TESTING DEVICE, CRUCIBLE TESTING METHOD, SILICA GLASS CRUCIBLE, METHOD FOR MANUFACTURING SILICA GLASS CRUCIBLE, METHOD FOR MANUFACTURING SILICON INGOT, AND METHOD FOR MANUFACTURING HOMOEPITAXIAL WAFER
Document Type and Number:
WIPO Patent Application WO/2017/110967
Kind Code:
A1
Abstract:
The purpose of the present invention is to solve the problem of not being able to test the presence of cracks that may initiate breakage. This crucible testing device that tests breakability of a silica glass crucible includes an acoustic emission (AE) wave detection means which is disposed on a surface of the silica glass crucible, and detects AE waves that are generated when a predetermined external force is applied to the silica glass crucible. The crucible testing device also evaluates the breakability of the silica glass crucible on the basis of the detection result from the AE wave detection means.
Inventors:
SUDO TOSHIAKI (JP)
SATO TADAHIRO (JP)
KITAHARA KEN (JP)
KITAHARA ERIKO (JP)
YAMAZAKI TORU (JP)
SATO TADAHIRO (JP)
KITAHARA KEN (JP)
KITAHARA ERIKO (JP)
YAMAZAKI TORU (JP)
Application Number:
PCT/JP2016/088285
Publication Date:
June 29, 2017
Filing Date:
December 22, 2016
Export Citation:
Assignee:
SUMCO CORP (JP)
International Classes:
C30B29/06; C03B20/00; C30B15/10
Domestic Patent References:
| WO2016047694A1 | 2016-03-31 |
Foreign References:
| JP2008156224A | 2008-07-10 | |||
| JP2000344536A | 2000-12-12 | |||
| JP2014091640A | 2014-05-19 | |||
| JP2013512186A | 2013-04-11 | |||
| JPH0633066U | 1994-04-28 |
Other References:
KISHI: "Evaluation of Strength of Materials by Acoustic Emission (I)", JOURNAL OF THE SOCIETY OF MATERIALS SCIENCE, JAPAN, vol. 29, no. 323, 1980, pages 765 - 775, XP055600217
Attorney, Agent or Firm:
NOMURA Ichiro (JP)
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