DEVICE FOR PRODUCING AND METHOD FOR PRODUCING HEAT-RESISTANT COMPOSITE MATERIAL

Title:

DEVICE FOR PRODUCING AND METHOD FOR PRODUCING HEAT-RESISTANT COMPOSITE MATERIAL

Document Type and Number:

WIPO Patent Application WO/2015/122533

Kind Code:

A1

Abstract:

In the present invention, in the production of a heat-resistant composite material resulting from impregnating a ceramic fiber preform with silicon carbide, a mixed gas containing starting material gas, an additive gas, and a carrier gas is supplied to a substrate (100) having a minute structure such as a preform stored in an electric furnace (10), silicon carbide is deposited to form a film by means of a chemical vapor deposition method or a chemical vapor infiltration method, and the film formation growth speed and embedding uniformity are controlled by means of the amount of additive gas added to the starting material gas, the starting material gas contains tetramethylsilane , and the additive gas contains a molecule containing chlorine such as methyl chloride or hydrogen chloride. The film formation growth speed and embedding uniformity of the silicon carbide are both achieved.

Inventors:

NAKAMURA TAKESHI (JP)
HOTOZUKA KOZUE (JP)
FUKUSHIMA YASUYUKI (JP)
SHIMOGAKI YUKIHIRO (JP)
MOMOSE TAKESHI (JP)
SUGIURA HIDETOSHI (JP)
SHIMA KOHEI (JP)
FUNATO YUICHI (JP)

Application Number:

PCT/JP2015/054272

Publication Date:

August 20, 2015

Filing Date:

February 17, 2015

Export Citation:

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Assignee:

IHI CORP (JP)
UNIV TOKYO (JP)

International Classes:

C23C16/42

Domestic Patent References:

WO2013172359A1

2013-11-21

Foreign References:

JPH08321471A

1996-12-03

Other References: