Title:
DRAWING DATA ACQUIRING METHOD AND DEVICE, AND DRAWING METHOD AND APPARATUS
Document Type and Number:
WIPO Patent Application WO/2007/037166
Kind Code:
A1
Abstract:
A method for acquiring exposure point data used for forming an exposure pattern on
a substrate by exposure by means of an exposure head by reading out one item of previously
stored trace data according to a variation in shape of the substrate. The trace
data is reduced, and thereby adequate exposure point data can be acquired. Trace
data corresponding to virtual exposure point data traces is acquired and stored
in advance, and exposure point data trace information corresponding to an exposure
trace on a substrate during the exposure is acquired. According to the exposure
point data trance information, exposure image data is sampled. Data on the difference
between the sampling data and trace data corresponding to virtual exposure point
data trace information similar to the exposure point data trace information
is acquired. From the difference coded data and the trace data, exposure point
data is acquired.
Inventors:
KINJO NAOTO (JP)
Application Number:
PCT/JP2006/318743
Publication Date:
April 05, 2007
Filing Date:
September 21, 2006
Export Citation:
Assignee:
FUJIFILM CORP (JP)
KINJO NAOTO (JP)
KINJO NAOTO (JP)
International Classes:
G03F7/20
Foreign References:
| JP2004235487A | 2004-08-19 | |||
| JP2005043424A | 2005-02-17 | |||
| JP2005208297A | 2005-08-04 |
Attorney, Agent or Firm:
YANAGIDA, Masashi et al. (7F Shin-Yokohama KS Bldg., 3-18-3, Shin-Yokohama, Kohoku-k, Yokohama-shi Kanagawa, JP)
Download PDF: