Title:
ELECTRODE, LAMINATED STRUCTURE, ELECTRONIC DEVICE, ELECTRONIC EQUIPMENT, AND METHODS FOR PRODUCING SAME
Document Type and Number:
WIPO Patent Application WO/2023/145807
Kind Code:
A1
Abstract:
[Problem] To provide an electrode which comprises an epitaxial film that has good adhesiveness and crystallinity, a laminated structure, an electronic device, and electronic equipment which include the electrode, and production methods which make it possible to obtain the same in an industrially advantageous manner. [Solution] When forming at least a compound film on a crystal substrate, subsequently laminating an epitaxial film that includes a crystalline compound, and further laminating a second epitaxial film of a differing composition from the epitaxial film either directly on the epitaxial film or with another layer therebetween, the second epitaxial film is a single-crystal film having a zero-defect region in an area of not less than 100 nm2 for constituting an electrode, and the epitaxial film is laminated by using a compound element in the compound film to form the epitaxial film.
Inventors:
KIJIMA TAKESHI (JP)
Application Number:
PCT/JP2023/002398
Publication Date:
August 03, 2023
Filing Date:
January 26, 2023
Export Citation:
Assignee:
GAIANIXX INC (JP)
International Classes:
C30B29/16; H01L21/314; H01L21/316; H10N30/06; H10N30/076; H10N30/079; H10N30/50; H10N30/87
Domestic Patent References:
| WO2015064341A1 | 2015-05-07 | |||
| WO2020179210A1 | 2020-09-10 |
Foreign References:
| JP2019216181A | 2019-12-19 | |||
| JP2004006960A | 2004-01-08 |
Download PDF: