Title:
ELECTRODE PIECE, CARRIER, AND COATING SYSTEM
Document Type and Number:
WIPO Patent Application WO/2021/147255
Kind Code:
A1
Abstract:
The present application relates to the technical field of solar cells. Disclosed are an electrode piece, a carrier, and a coating system, for eliminating the abnormal color of the edge of a silicon wafer caused by the unwanted deposition on the wafer edge during a surface film formation process, thereby improving the coating quality of silicon wafers. The electrode piece comprises: at least one carrier unit. At least one surface of each carrier unit has a carrier area and a peripheral area, and the peripheral area is located on the periphery of the carrier area. At least one surface of each carrier unit is provided with at least one groove for preventing the unwanted deposition on the wafer edge. The at least one groove is located at the peripheral area. The carrier comprises the electrode piece mentioned in the technical solution. The electrode piece provided in the present application is used in a coating system.
Inventors:
ZHAO ZANLIANG (CN)
Application Number:
PCT/CN2020/100197
Publication Date:
July 29, 2021
Filing Date:
July 03, 2020
Export Citation:
Assignee:
LONGI SOLAR TECH NINGXIA CO LTD (CN)
International Classes:
C23C16/458; C23C16/44; C23C16/50; H01L21/673
Foreign References:
| CN108475653A | 2018-08-31 | |||
| CN106929828A | 2017-07-07 | |||
| JPH06283439A | 1994-10-07 | |||
| CN209418475U | 2019-09-20 | |||
| CN207199584U | 2018-04-06 |
Attorney, Agent or Firm:
BEIJING RUN ZEHENG INTELLECTUAL PROPERTY LAW FIRM (CN)
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