Title:
ELECTRON LENS AND THE ELECTRON BEAM DEVICE
Document Type and Number:
WIPO Patent Application WO/2012/057166
Kind Code:
A1
Abstract:
A fine pattern is drawn effectively using a permanent magnet. Provided are: an outside cylinder (201) formed from a cylindrical magnetic body with the Z axis as the center axis; a cylindrical permanent magnet (202) disposed inside the outside cylinder and magnetized in the direction of the Z axis; a correction coil (204) that is disposed in the space within the cylindrical permanent magnet on the inside of the cylindrical permanent magnet and adjusts the magnetic field intensity from the cylindrical permanent magnet in the direction of the Z axis; and a refrigerant flow path (203) that is disposed in the space between the cylindrical permanent magnet and the correction coil, has a refrigerant made to flow inside, and suppresses temperature changes in the cylindrical permanent magnet.
Inventors:
YASUDA HIROSHI (JP)
Application Number:
PCT/JP2011/074588
Publication Date:
May 03, 2012
Filing Date:
October 25, 2011
Export Citation:
Assignee:
PARAM CORP (JP)
YASUDA HIROSHI (JP)
YASUDA HIROSHI (JP)
International Classes:
H01J37/143; H01J37/141; H01J37/305; H01L21/027
Domestic Patent References:
| WO2009157054A1 | 2009-12-30 |
Foreign References:
| JPS63244546A | 1988-10-12 | |||
| JP2007311117A | 2007-11-29 |
Other References:
See also references of EP 2587517A4
Attorney, Agent or Firm:
YKI Patent Attorneys (JP)
Patent business corporation YKI international patent firm (JP)
Patent business corporation YKI international patent firm (JP)
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Claims: