Title:
ELECTROSTATIC ACTUATOR AND ITS DRIVE METHOD
Document Type and Number:
WIPO Patent Application WO/2007/049723
Kind Code:
A1
Abstract:
[PROBLEMS] To provide an electrostatic actuator and its drive method capable
of reducing the number of systems for supplying drive voltage and perform drive
with a simple configuration. [MEANS FOR SOLVING PROBLEMS] A stator electrode
(23) has a plurality of electric systems (A, B, C phase electrode) repeatedly
arranged in a predetermined order in the movement direction. A pitch (frequency
length) 3P1 in the movement direction between the stator electrodes (23) constituting
the identical electric systems is made identical to the pitch c of a moving direction
of a movable element electrode (33) in the movement direction. The movable element
has at least two movable element electrodes (33a1, 33b1) having different lengths
values.
Inventors:
TAKAHASHI ISAO (JP)
Application Number:
PCT/JP2006/321427
Publication Date:
May 03, 2007
Filing Date:
October 26, 2006
Export Citation:
Assignee:
ALPS ELECTRIC CO LTD (JP)
TAKAHASHI ISAO (JP)
TAKAHASHI ISAO (JP)
International Classes:
H02N1/00
Foreign References:
| JPH0951685A | 1997-02-18 |
Attorney, Agent or Firm:
NOZAKI, Teruo (1-21-11 Higashi-Ikebukuro Toshima-k, Tokyo 13, JP)
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