Title:
ENHANCED PHOTO-EMF SENSOR WITH HIGH BANDWIDTH AND LARGE FIELD OF VIEW
Document Type and Number:
WIPO Patent Application WO2003067676
Kind Code:
A3
Abstract:
A photo-EMF sensor and a method of making same has a substrate with a semiconducting layer; a plurality of sensing regions in the layer, each sensing region including (i) a pair of electrodes disposed in, on or above the layer and (ii) an active region in the layer disposed adjacent said pair of electrodes; and a plurality of inactive regions in said the arranged between adjacent sensing regions. The inactive regions and the sensing regions are dosed with a desensitizing agent, the inactive regions receiving a relatively higher dose of the desensitizing agent and the sensing regions receiving a relatively lower dose of the desensitizing agent. The active layer is preferably placed in a monolithic Fabry-Perot cavity to enhance the optical efficiency and performance of the sensor.
Inventors:
PEPPER DAVID M (US)
KLEIN MARVIN B (US)
NOLTE DAVID (US)
DUNNING GILMORE J (US)
KLEIN MARVIN B (US)
NOLTE DAVID (US)
DUNNING GILMORE J (US)
Application Number:
PCT/US2002/030609
Publication Date:
November 27, 2003
Filing Date:
September 25, 2002
Export Citation:
Assignee:
HRL LAB LLC (US)
PEPPER DAVID M (US)
KLEIN MARVIN B (US)
NOLTE DAVID (US)
DUNNING GILMORE J (US)
PEPPER DAVID M (US)
KLEIN MARVIN B (US)
NOLTE DAVID (US)
DUNNING GILMORE J (US)
International Classes:
G01J5/28; H01L21/66; H01L31/04; H01L31/09; H01L31/10; H01L51/00; (IPC1-7): H01L31/04; G01J5/28
Foreign References:
| US6342721B1 | 2002-01-29 | |||
| US4281208A | 1981-07-28 | |||
| US4924285A | 1990-05-08 |
Other References:
PEPPER D M ET AL: "Enhanced responsivity of photo-induced-EMF adaptive photodetectors using asymmetric interdigitated contacts: scaling limits and application to laser ultrasound sensing", NONLINEAR OPTICS: MATERIALS, FUNDAMENTALS, AND APPLICATIONS. TECHNICAL DIGEST. POSTCONFERENCE EDITION. TOPS VOL.46 (IEEE CAT. NO.00CH37174), NONLINEAR OPTICS: MATERIALS, FUNDAMENTALS, AND APPLICATIONS. TECHNICAL DIGEST. TOPS VOL.46, KAUA'I-LIHUE, HI,, 2000, Washington, DC, USA, Opt. Soc. America, USA, pages 65 - 67, XP002256317, ISBN: 1-55752-646-X
COY J A ET AL: "Asymmetric interdigitated metal-semiconductor-metal contacts for improved adaptive photoinduced-electromotive-force detectors", JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B (OPTICAL PHYSICS), MAY 2000, OPT. SOC. AMERICA, USA, vol. 17, no. 5, pages 697 - 704, XP002256318, ISSN: 0740-3224
COY J A ET AL: "Asymmetric interdigitated metal-semiconductor-metal contacts for improved adaptive photoinduced-electromotive-force detectors", JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B (OPTICAL PHYSICS), MAY 2000, OPT. SOC. AMERICA, USA, vol. 17, no. 5, pages 697 - 704, XP002256318, ISSN: 0740-3224
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