Title:
FEEDER FOR DRUG SOLUTION OR ULTRAPURIFIED WATER, BOARD TREATING SYSTEM, BOARD TREATING DEVICE OR BOARD TREATING METHOD
Document Type and Number:
WIPO Patent Application WO/2007/119745
Kind Code:
A1
Abstract:
By softening PVDF, which is a fluorinated resin, by adding a perfluoro monomer
thereto, the oxygen permeation level can be remarkably lowered and a flexible
fluorinated resin tube can be obtained. By providing a nylon tube as an outer layer,
the oxygen permeation level can be lowered too. These tubes are employed between
a feeder (111) for drug solution(s) or ultrapurified water and a washing device
or a device (101) for utilizing drug solution(s) or ultrapurified water such
as a wet etching device.
Inventors:
OHMI TADAHIRO (JP)
TERAMOTO AKINOBU (JP)
YAMANAKA JIRO (JP)
MIZUTANI NOBUTAKA (JP)
NAKAMURA OSAMU (JP)
MATSUOKA TAKAAKI (JP)
OHKURA RYOICHI (JP)
TERAMOTO AKINOBU (JP)
YAMANAKA JIRO (JP)
MIZUTANI NOBUTAKA (JP)
NAKAMURA OSAMU (JP)
MATSUOKA TAKAAKI (JP)
OHKURA RYOICHI (JP)
Application Number:
PCT/JP2007/057971
Publication Date:
October 25, 2007
Filing Date:
April 11, 2007
Export Citation:
Assignee:
UNIV TOHOKU (JP)
TOKYO ELECTRON LTD (JP)
REALIZE ADVANCED TECHNOLOGY LT (JP)
OHMI TADAHIRO (JP)
TERAMOTO AKINOBU (JP)
YAMANAKA JIRO (JP)
MIZUTANI NOBUTAKA (JP)
NAKAMURA OSAMU (JP)
MATSUOKA TAKAAKI (JP)
OHKURA RYOICHI (JP)
TOKYO ELECTRON LTD (JP)
REALIZE ADVANCED TECHNOLOGY LT (JP)
OHMI TADAHIRO (JP)
TERAMOTO AKINOBU (JP)
YAMANAKA JIRO (JP)
MIZUTANI NOBUTAKA (JP)
NAKAMURA OSAMU (JP)
MATSUOKA TAKAAKI (JP)
OHKURA RYOICHI (JP)
International Classes:
H01L21/304; F16L11/06
Foreign References:
| JPH06190360A | 1994-07-12 | |||
| JP2005315362A | 2005-11-10 | |||
| JPH10337405A | 1998-12-22 | |||
| JPH10128253A | 1998-05-19 | |||
| JP2004049945A | 2004-02-19 |
Attorney, Agent or Firm:
IKEDA, Noriyasu et al. (4-10 Nishishinbashi 1-chome, Minato-k, Tokyo 03, JP)
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