Title:
FILTER UNIT, REFINING DEVICE, MANUFACTURING DEVICE, AND CHEMICAL
Document Type and Number:
WIPO Patent Application WO/2019/013155
Kind Code:
A1
Abstract:
The present invention addresses the problem of providing a filter unit used for refining in order to obtain a chemical having excellent defect control performance. The present invention also addresses the problem of providing a refining device, a manufacturing device, and a chemical. This filter unit has, each independently disposed midway in a pipe with which a substance to be refined is supplied: a first housing in which a first filter is accommodated, the first filter comprising a filter material that contains a first polymer having a polydentate substituent group; and a second housing in which a second filter is accommodated, the second filter comprising a filter material that contains a second polymer having at least one bond selected from the group constituting an amide bond, an imide bond, and an ester bond, the filter material having a pore diameter of 50 nm or less.
Inventors:
KAMIMURA TETSUYA (JP)
Application Number:
PCT/JP2018/025844
Publication Date:
January 17, 2019
Filing Date:
July 09, 2018
Export Citation:
Assignee:
FUJIFILM CORP (JP)
International Classes:
B01D61/18; B01D71/48; B01D71/56; B01D71/64; B01J45/00; C02F1/42; G03F7/004; G03F7/26
Foreign References:
| JP2007033542A | 2007-02-08 | |||
| JP2017039091A | 2017-02-23 | |||
| JP2013061426A | 2013-04-04 | |||
| JP2004330056A | 2004-11-25 |
Attorney, Agent or Firm:
WATANABE Mochitoshi et al. (JP)
Download PDF: