FLUOROCARBON DECOMPOSER AND DECOMPOSITION METHODS

WIPO Patent Application WO/2002/044297

A1

A decomposer which comprises as active ingredients aluminum oxide and either an oxide of an alkaline earth metal or an alkaline earth metal compound which thermally decomposes into an oxide of the alkaline earth metal; a method of fluorocarbon decomposition which comprises bringing, with heating, the fluorocarbon into contact with a decomposer comprising aluminum oxide and an oxide of an alkaline earth metal as active ingredients; and a method of fluorocarbon decomposition which comprises bringing, with heating, the fluorocarbon into contact alternately with a decomposer comprising aluminum oxide as an active ingredient and a decomposer comprising an oxide of an alkaline earth metal as an active ingredient. Thus, fluorocarbons contained in a waste gas discharged from semiconductor production steps, etc., such as CF¿4?, can be decomposed while preventing the decomposer(s) from being deactivated in a short time and without discharging a corrosive gas such as hydrogen fluoride. At a relatively low temperature of 1,000°C or below, 99.9% or more of the fluorocarbons can be decomposed.

OTSUKA KENJI (JP)
NAWA YOUJI (JP)
IKEDA TOMOHISA (JP)
OCHI KOSHI (JP)

PCT/JP2001/010391

June 06, 2002

November 28, 2001

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JAPAN PIONICS (JP)
OTSUKA KENJI (JP)
NAWA YOUJI (JP)
IKEDA TOMOHISA (JP)
OCHI KOSHI (JP)

B01D53/68; B01D53/34; B01D53/86; B01J23/02; C09K3/00; (IPC1-7): C09K3/00; B01D53/70; B01D53/86; B01J23/02; B01J23/04; B01J27/232; C07B35/06; C07B37/06; C07C19/08; C07C21/19

EP0546464A1	1993-06-16
EP0948990A1	1999-10-13
EP0948995A1	1999-10-13

Ohtani, Tamotsu (Toranomon 3-chome Minato-ku, Tokyo, JP)

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