Title:
FORMING CARBON NANOTUBES AT LOWER TEMPERATURES SUITABLE FOR ELECTRON-EMITTING DEVICE, AND ASSOCIATED FABRICATION METHOD
Document Type and Number:
WIPO Patent Application WO2005004185
Kind Code:
A3
Abstract:
An electron-emitting device contains a vertical emitter electrode patterned into multiple laterally separated sections situated between the electronemissive elements, on one hand, and a substrate, on the other hand. The electron-emissive elements comprising carbon nanotubes are grown at a temperature range of 300 °C to 500 °C compatible with the thermal stress of the underlying substrate. The electron-emissive elements are grown on a granulized catalyst layer that provides a large surface arda for growing the electronemissive elements at such low temperature ranges. To ensure growth uniformity of the carbon nanotubes, the granularized substrate is soaked in a pre-growth plasma gas to enhance the surface diffusion properties of the granularized substrate for carbon diffusion.
Inventors:
KANG SU GU (KR)
BAE WOO KYUNG (KR)
KIM JUNG JAE (KR)
BAE WOO KYUNG (KR)
KIM JUNG JAE (KR)
Application Number:
PCT/US2004/018640
Publication Date:
September 29, 2005
Filing Date:
June 09, 2004
Export Citation:
Assignee:
CDREAM DISPLAY CORP (US)
KANG SU GU (KR)
BAE WOO KYUNG (KR)
KIM JUNG JAE (KR)
KANG SU GU (KR)
BAE WOO KYUNG (KR)
KIM JUNG JAE (KR)
International Classes:
H01J9/04; H01J9/12; H01J9/14; H01J; (IPC1-7): H01J9/04; H01J9/12; H01J9/14
Domestic Patent References:
WO2001094260A1 | 2001-12-13 |
Foreign References:
US6062931A | 2000-05-16 | |||
US6331209B1 | 2001-12-18 | |||
US6692717B1 | 2004-02-17 |
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