GAS PRESSURE CONTROL ACTUATOR, GAS BEARING MECHANISM FOR THE GAS PRESSURE CONTROL ACTUATOR, AND MINUTE DISPLACEMENT OUTPUT DEVICE USING THE GAS PRESSURE CONTROL ACTUATOR

Title:

GAS PRESSURE CONTROL ACTUATOR, GAS BEARING MECHANISM FOR THE GAS PRESSURE CONTROL ACTUATOR, AND MINUTE DISPLACEMENT OUTPUT DEVICE USING THE GAS PRESSURE CONTROL ACTUATOR

Document Type and Number:

WIPO Patent Application WO/2007/077878

Kind Code:

A1

Abstract:

In a gas pressure control actuator (100), a plurality of annular flat-plate movers (20) including curved springs and annular flat plates are supported on a support pin (22) attached to a guide portion (102). An output mover (104) applies a pushing force by a pushing gas pressure (P2) to the annular flat-plate movers (20). The curved springs have apertures for passing a gas therethrough, and the displacement rigidity of the support pin (22) in the axial direction is made smaller than that in the radial direction. The gas having a control gas pressure (P1) flows from a supply port (54) in the bottom face of a guide portion (52) through the apertures of the individual curved springs of the annular flat-plate movers (20) to the clearances between the adjoining annular flat-plate movers (20). Those clearances can be adjusted by controlling the control gas pressure (P1) while balancing with the pushing force. The whole moving range is enlarged by increasing the number of the clearances along the axial direction.

Inventors:

SASAKI KATSUMI (JP)
HIRAYAMA TOMOKO (JP)

Application Number:

PCT/JP2006/326081

Publication Date:

July 12, 2007

Filing Date:

December 27, 2006

Export Citation:

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Assignee:

PNEUMATIC SERVO CONTROLS LTD (JP)
SASAKI KATSUMI (JP)
HIRAYAMA TOMOKO (JP)

International Classes:

F15B15/14; F16C32/06; G12B5/00; H01L21/68

Foreign References:

JP2005351312A	2005-12-22
JPH11108059A	1999-04-20
JPS5164145A	1976-06-03
JPS6451241A	1989-02-27
JPS5751002A	1982-03-25
JP2005268293A	2005-09-29

Other References: