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Title:
HIGH SENSITIVITY OPTICAL INSPECTION SYSTEM AND METHOD FOR DETECTING FLAWS ON A DIFFRACTIVE SURFACE
Document Type and Number:
WIPO Patent Application WO2001096840
Kind Code:
A3
Abstract:
An improved high sensitivity optical inspection system (10) for detecting flaws on a diffractive surface (12) containing surface patterns includes: a first and a second illumination means (26, 31a, 31b) for illuminating predetermined regions (22) on the diffractive surface to generate a scattered intensity distribution (35, 36, 37) in response to either a flaw or a surface pattern; means for detecting the intensity level of the scattered intensity distribution at a plurality of locations about the diffractive surface; means for establishing a minimum detected intensity level; means, responsive to the minimum detected intensity level, for indicating the absence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level is below a threshold intensity level and for indicating the presence of a flaw on the illuminated region of the diffractive surface when the minimum detected intensity level exceeds the threshold intensity level; and means for moving (18) the diffractive surface to generate a scan pattern on the diffractive surface to inspect the entire surface.

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Inventors:
CHASE ERIC
ORMSBY JAY
BOUDOUR ABDU
BROUDE SERGEY
QUACKENBOS LLOYD
Application Number:
PCT/US2001/040955
Publication Date:
June 27, 2002
Filing Date:
June 14, 2001
Export Citation:
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Assignee:
QC OPTICS INC (US)
International Classes:
G01N21/95; G01N21/956; G06T1/00; H01L21/66; (IPC1-7): G01N21/956; G01N21/95; G01R31/311; H01L21/66
Foreign References:
US5774222A1998-06-30
US5625193A1997-04-29
US5644393A1997-07-01
EP1065499A22001-01-03
US6104481A2000-08-15
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