Title:
INSPECTION APPARATUS USING TERAHERTZ WAVES
Document Type and Number:
WIPO Patent Application WO/2023/163480
Kind Code:
A1
Abstract:
An inspection apparatus using terahertz waves is disclosed. One aspect of the present embodiment provides an inspection apparatus using terahertz waves, which is an inspection apparatus for inspecting the structure or state of an object in a black box, comprising: a light source that irradiates a beam of a terahertz frequency band; a reflector that reflects the beam irradiated from the light source to an object, and reflects the light reflected from the object back toward the light source; a lens unit that focuses the beam reflected by the reflector onto the object; a light receiving unit that receives a beam reflected from the object; an inspection unit that analyzes the reflected beam received from the light receiving unit and inspects the structure or state of the object; a beam splitter that passes the beam irradiated from the light source and reflects the light reflected from the reflector to the light receiving unit after being reflected from the object; and a control unit that controls operations of the light source, the reflector, and the inspection unit.
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Inventors:
KIM JANG SUN (KR)
CHO SU YOUNG (KR)
KIM YI SEOB (KR)
KO SANG JU (KR)
KIM SUN JAE (KR)
PARK MIN WOO (KR)
AHN YEONG HWAN (KR)
CHO SU YOUNG (KR)
KIM YI SEOB (KR)
KO SANG JU (KR)
KIM SUN JAE (KR)
PARK MIN WOO (KR)
AHN YEONG HWAN (KR)
Application Number:
PCT/KR2023/002443
Publication Date:
August 31, 2023
Filing Date:
February 21, 2023
Export Citation:
Assignee:
PANOPTICS CORP (KR)
International Classes:
G01N21/3581; G01N21/88; G02B5/08; G02B27/10
Domestic Patent References:
| WO2017203662A1 | 2017-11-30 |
Foreign References:
| KR102043881B1 | 2019-12-02 | |||
| JP2007205926A | 2007-08-16 | |||
| KR20190118875A | 2019-10-21 | |||
| KR20210076598A | 2021-06-24 |
Attorney, Agent or Firm:
KIM, Tae Young (KR)
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