INSTRUMENT AND MOUNTING EQUIPMENT USED IN CLEAN ROOM

Title:

INSTRUMENT AND MOUNTING EQUIPMENT USED IN CLEAN ROOM

Document Type and Number:

WIPO Patent Application WO/1997/037381

Kind Code:

A1

Abstract:

An instrument which is used for handling substrates in a clean room maintained at a room temperature under the atmospheric pressure and contains a resin basic material and at least one additive selected from among a group composed of a lubricant, plasticizer, an antioxidant and an antistatic agent. The additive does not generate any gaseous organic component under the conditions of a room temperature and the atmospheric pressure.

Inventors:

SAITO MISAKO (JP)
MATSUO TAKENOBU (JP)
WAKABAYASHI TSUYOSHI (JP)
KOBAYASHI SADAO (JP)
WAKAYAMA YOSHIHIDE (JP)
IMAFUKU MASAYUKI (JP)

Application Number:

PCT/JP1997/001039

Publication Date:

October 09, 1997

Filing Date:

March 27, 1997

Export Citation:

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Assignee:

TOKYO ELECTRON LTD (JP)
TAISEI CORP (JP)
SAITO MISAKO (JP)
MATSUO TAKENOBU (JP)
WAKABAYASHI TSUYOSHI (JP)
KOBAYASHI SADAO (JP)
WAKAYAMA YOSHIHIDE (JP)
IMAFUKU MASAYUKI (JP)

International Classes:

A43B1/14; A43B3/16; H01L21/67; H01L21/68; H01L21/673; H01L21/677; (IPC1-7): H01L21/68; A43B3/00; A41D13/02

Foreign References:

JPH0341747A	1991-02-22
JPH05508517A	1993-11-25
JPH08288377A	1996-11-01
JPH08250581A	1996-09-27
JPH01119501U	1989-08-14

Other References: