LARGE-NUMERICAL-APERTURE PHASE-SHIFTING DOUBLE-PINHOLE DIFFRACTION INTERFEROMETER AND TESTING METHOD THEREOF

Title:

LARGE-NUMERICAL-APERTURE PHASE-SHIFTING DOUBLE-PINHOLE DIFFRACTION INTERFEROMETER AND TESTING METHOD THEREOF

Document Type and Number:

WIPO Patent Application WO/2016/004550

Kind Code:

A1

Abstract:

A large-numerical-aperture phase-shifting double-pinhole diffraction interferometer and testing method thereof, the diffraction interferometer comprising a test reference optical path (21), a test optical path (22) and a pinhole substrate (14); the pinhole substrate (14) is provided with a test pinhole (24) and a test reference pinhole (23) thereon; the diffraction wavefront emitted by the test pinhole (24) is reflected by an optical element assembly (19) to be tested adjacent to the pinhole substrate (14) and is converged adjacent to the test reference pinhole (23); and the wavefront carries surface shape information of the optical element assembly (19) to be tested, and after being reflected by the pinhole substrate (14), forms interference fringe with the diffraction wavefront emitted by the test reference pinhole (23).

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Inventors:

NIKOLAY VOZNESENSKIY (EE)
MA DONGMEI (CN)
JIN CHUNSHUI (CN)
ZHANG HAITAO (CN)
YU JIE (CN)
MARIIA VOZNESENSKAIA (EE)
TATIANA VOZNESENSKAIA (EE)
ZHANG WENLONG (CN)

Application Number:

PCT/CN2014/000951

Publication Date:

January 14, 2016

Filing Date:

October 27, 2014

Export Citation:

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Assignee:

CHANGCHUN OPTICS FINE MECH (CN)
VTT NTM OÜ (EE)

International Classes:

G01B9/02

Foreign References:

CN102564301A	2012-07-11
CN102519358A	2012-06-27
US7095510B2	2006-08-22
US7084983B2	2006-08-01
US8767217B2	2014-07-01

Attorney, Agent or Firm:

CHANGCHUN JINGHUA PATENT TRADEMARK AGENT LAW OFFICE (CN)
长春菁华专利商标代理事务所 (CN)

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