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Title:
LOAD PORT
Document Type and Number:
WIPO Patent Application WO/2017/094694
Kind Code:
A1
Abstract:
A mapping sensor 30 provided to a load port 1 maps an FFC (an example of an article to be processed) accommodated in a cassette 51 (52). The mapping sensor 30 has a sensor part 31 and a raising/lowering part 32 for raising and lowering the sensor part 31. The mapping sensor 30 is disposed on the side opposite from the conveying space side of a base 10 of the load port 1.

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Inventors:
MORIHANA TOSHIMITSU (JP)
OSAWA MASAHIRO (JP)
MATSUMOTO YUKI (JP)
Application Number:
PCT/JP2016/085276
Publication Date:
June 08, 2017
Filing Date:
November 29, 2016
Export Citation:
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Assignee:
SINFONIA TECHNOLOGY CO LTD (JP)
International Classes:
H01L21/677
Foreign References:
JP2000269308A2000-09-29
JP2015050410A2015-03-16
JP2000294617A2000-10-20
JP2004088017A2004-03-18
JP2005064515A2005-03-10
JPH113927A1999-01-06
Attorney, Agent or Firm:
KAJI, SUHARA & ASSOCIATES (JP)
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