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Title:
MAINTENANCE METHOD, EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2007/136089
Kind Code:
A1
Abstract:
A maintenance method for performing maintenance of an exposure apparatus comprising a liquid-immersion space defining member (30) for defining a liquid-immersion region by supplying liquid (1) in the space between an optical member (2) and a substrate (P), a liquid supply mechanism (10) for supplying the liquid (1) into the liquid-immersion space, a substrate stage (PST) for moving the substrate (P), and a measurement stage (MST) on which a reference mark is made. To clean a liquid-immersion space defining member (30), a cleaning liquid is supplied into the space between the measurement stage (MST) and the liquid-immersion space defining member (30). The exposure apparatus has various types of cleaning mechanisms for cleaning the liquid-immersion space defining member (30). While efficiently performing maintenance of the exposure apparatus, liquid-immersion exposure can be performed.

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Inventors:
SHIBAZAKI YUICHI (JP)
MIZUTANI TAKEYUKI (JP)
ICHINOSE GO (JP)
SHIBUTA MAKOTO (JP)
Application Number:
PCT/JP2007/060519
Publication Date:
November 29, 2007
Filing Date:
May 23, 2007
Export Citation:
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Assignee:
NIKON CORP (JP)
SHIBAZAKI YUICHI (JP)
MIZUTANI TAKEYUKI (JP)
ICHINOSE GO (JP)
SHIBUTA MAKOTO (JP)
International Classes:
H01L21/027; G03F7/20
Domestic Patent References:
WO2005124833A12005-12-29
WO1999049504A11999-09-30
WO2006038952A22006-04-13
WO1999028790A11999-06-10
WO2005122218A12005-12-22
WO2004055803A12004-07-01
WO2004057589A12004-07-08
WO2004057590A12004-07-08
WO2005029559A12005-03-31
WO1999060361A11999-11-25
WO2005074014A12005-08-11
WO2006013806A12006-02-09
WO1999023692A11999-05-14
WO2004019128A22004-03-04
WO2001035168A12001-05-17
WO2005059617A22005-06-30
WO2005059618A22005-06-30
WO1999046835A11999-09-16
Foreign References:
JP2005277363A2005-10-06
JP2006032750A2006-02-02
JP2001510577A2001-07-31
EP1420298A22004-05-19
US20060231206A12006-10-19
JPH0521314A1993-01-29
US5243195A1993-09-07
JPS57117238A1982-07-21
US4465368A1984-08-14
JP2002014005A2002-01-18
US20020041377A12002-04-11
JPH1116816A1999-01-22
US20020061469A12002-05-23
EP1079223A12001-02-28
EP1713113A12006-10-18
JPH11135400A1999-05-21
JP2000164504A2000-06-16
US6897963B12005-05-24
US6778257B22004-08-17
JPH08313842A1996-11-29
JP2004304135A2004-10-28
JPH10163099A1998-06-19
JPH10214783A1998-08-11
US6341007B12002-01-22
US6400441B12002-06-04
US6549269B12003-04-15
US6590634B12003-07-08
JP2000505958A2000-05-16
US5969441A1999-10-19
US6208407B12001-03-27
US20050280791A12005-12-22
JP2004289126A2004-10-14
US6952253B22005-10-04
US20050248856A12005-11-10
US7023610B22006-04-04
JP2004519850A2004-07-02
US6611316B22003-08-26
Other References:
See also references of EP 2034515A4
Attorney, Agent or Firm:
KAWAKITA, Kijuro (5-4Shinjuku 1-chome, Shinjuku-ku, Tokyo 22, JP)
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