Title:
MATERIAL SOURCE ARRANGMENT AND NOZZLE FOR VACUUM DEPOSITION
Document Type and Number:
WIPO Patent Application WO/2016/070941
Kind Code:
A8
Abstract:
A material source arrangement (100) for depositing a material on a substrate (121) in a vacuum deposition chamber (110) is described. The material source arrangement includes a distribution pipe (106) being configured to be in fluid communication with a material source (102) providing the material to the distribution pipe (106); and at least one nozzle (200; 712) configured for guiding the material provided in the distribution pipe (106) to the vacuum deposition chamber (110). The nozzle (200; 712) includes a thread for repeatedly connecting and disconnecting the nozzle to the distribution pipe. Further, a deposition apparatus (300) for depositing material on a substrate (121) including a material source arrangement, a nozzle for a material source arrangement, and a method for providing a distribution pipe (106) and a nozzle (200; 712) for a material source arrangement (100) are described.
Inventors:
BANGERT STEFAN (DE)
SCHÜSSLER UWE (DE)
DIEGUEZ-CAMPO JOSE MANUEL (DE)
SCHÜSSLER UWE (DE)
DIEGUEZ-CAMPO JOSE MANUEL (DE)
Application Number:
PCT/EP2014/074088
Publication Date:
June 15, 2017
Filing Date:
November 07, 2014
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
BANGERT STEFAN (DE)
SCHÜSSLER UWE (DE)
DIEGUEZ-CAMPO JOSE MANUEL (DE)
BANGERT STEFAN (DE)
SCHÜSSLER UWE (DE)
DIEGUEZ-CAMPO JOSE MANUEL (DE)
International Classes:
C23C14/12; C23C14/24; C23C14/56; C23C16/455
Attorney, Agent or Firm:
ZIMMERMANN & PARTNER (DE)
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