Title:
MEASURING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2010/005013
Kind Code:
A1
Abstract:
Provided is a measuring apparatus wherein accuracy of measurement of the shape of a subject to be inspected is improved, while maintaining visibility. An illuminating apparatus (12) is provided with an LED (51) which emits a red light, an LED (52) which emits a green light, and an LED (53) which emits a blue light. The lights emitted from the LEDs (51, 52, 53) are simultaneously applied to a subject (2) to be inspected and become monitoring light which a human perceives as white light being lighted. A light source (31) for measurement is used for measuring the shape of the subject (2) to be inspected, and emits a laser beam composed of a visible light having a wavelength different from that of the light emitted from each of the LEDs (51, 52, 53). Among the light reflected by the subject (2) to be inspected, only the light emitted from the light source (31) for measurement passes through an optical filter (39) and forms an image on a light receiving surface of an imaging element (41).
Inventors:
USAMI HITOSHI (JP)
Application Number:
PCT/JP2009/062412
Publication Date:
January 14, 2010
Filing Date:
July 08, 2009
Export Citation:
Assignee:
NIKON CORP (JP)
USAMI HITOSHI (JP)
USAMI HITOSHI (JP)
International Classes:
G01B11/25
Foreign References:
| JPH07307599A | 1995-11-21 | |||
| JPH06201353A | 1994-07-19 | |||
| JP2007024510A | 2007-02-01 | |||
| JPH04130919U | 1992-12-01 | |||
| JPH0264928A | 1990-03-05 |
Other References:
See also references of EP 2309223A4
Attorney, Agent or Firm:
INAMOTO YOSHIO (JP)
Yoshio Inemoto (JP)
Yoshio Inemoto (JP)
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