Title:
METHOD FOR ADJUSTING NEEDLE TIP POSITION OF PROBE NEEDLE, AND INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/107173
Kind Code:
A1
Abstract:
This method for adjusting the needle tip position of a probe needle includes a photographing step, a storage step, a detection step, a specifying step, and an adjustment step. In the photographing step, an inspection device uses a camera to photograph a plurality of probe needles such that needle tips of the probe needles appear in one image while moving the camera along a height direction of the probe needle. In the storage step, the inspection device stores the image photographed by the camera in a storage unit in association with positional information on a plane on which the camera is focused. In the detection step, the inspection device detects an image on which the needle tip of the probe needle is focused on the basis of each photographed image. In the specifying step, the inspection device specifies the position of the needle tip of each probe needle in the detected image on the basis of the focused position of the needle tip of the probe needle. In the adjustment step, the inspection device adjusts the position of the needle tip of each probe needle on the basis of the specified position of the needle tip of each probe needle.
Inventors:
WATANABE SHINJIRO (JP)
Application Number:
PCT/JP2018/042384
Publication Date:
June 06, 2019
Filing Date:
November 16, 2018
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/66; G01B11/00; G01R31/28
Foreign References:
| JP2009512230A | 2009-03-19 | |||
| JP2006177787A | 2006-07-06 | |||
| JPH07110364A | 1995-04-25 | |||
| JP2005351807A | 2005-12-22 | |||
| JP2013522886A | 2013-06-13 | |||
| JP2014507685A | 2014-03-27 | |||
| JP2016145943A | 2016-08-12 | |||
| JPH0536767A | 1993-02-12 | |||
| JP2003022116A | 2003-01-24 | |||
| JPH07231018A | 1995-08-29 | |||
| JPH0917831A | 1997-01-17 | |||
| JP2007183193A | 2007-07-19 | |||
| JP2017183721A | 2017-10-05 |
Attorney, Agent or Firm:
SAKAI INTERNATIONAL PATENT OFFICE (JP)
Download PDF:
Previous Patent: ULTRASONIC SENSOR
Next Patent: ONBOARD DEVICE, POSITION ESTIMATION METHOD, AND COMPUTER PROGRAM
Next Patent: ONBOARD DEVICE, POSITION ESTIMATION METHOD, AND COMPUTER PROGRAM