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Title:
METHOD AND APPARATUS FOR SURFACE ROUGHNESS MEASUREMENT
Document Type and Number:
WIPO Patent Application WO2003010489
Kind Code:
A3
Abstract:
A method and apparatus for surface roughness measurement are provided, wherein the method and apparatus utilize a light source directing a light beam at an incidence angle theta onto a surface to be measured; a light detector measuring the intensity I(theta) of at least a portion of said light beam reflected from said surface; said light beam movable such that said incidence angle theta is variable over a sequence of angles (thetai ...thetan) between grazing and normal incidence to said surface, where i is the index counter of the incidence angle in the sequence from O to n, and n is the number of incidence angles; and a processing unit for recording and converting values of said incidence angles and values of intensity signals from said light detector into a surface roughness value for said surface.

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Inventors:
MENDELEEV VLADIMIR YA (RU)
SKOVOROD KO SERGEI N (RU)
KOURILOVITCH ANDREI (CA)
Application Number:
PCT/IB2002/004174
Publication Date:
November 20, 2003
Filing Date:
July 25, 2002
Export Citation:
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Assignee:
HOHNER CORP (CA)
MENDELEEV VLADIMIR YA (RU)
SKOVOROD KO SERGEI N (RU)
KOURILOVITCH ANDREI (CA)
International Classes:
G01B11/30; (IPC1-7): G01B11/30
Domestic Patent References:
WO2000058713A22000-10-05
Foreign References:
US4218144A1980-08-19
Other References:
V. YA. MENDELEEV: "Study of the possibility to measure the root-mean-square roughness of a shaded rough surface", OPTICS AND SPECTROSCOPY (TRANSLATED FROM OPTIKA I SPEKTROSKOPIYA,VOL. 89,NO. 3,SEPTEMBER 2000,PP 433-437, vol. 89, no. 3, September 2000 (2000-09-01), Russia, pages 397 - 401, XP001160823
J.C. LE BOSSE ET AL.: "Characterisation of surface roughness by laser light scattering:specularly scattered intensity measuremnt", WEAR, vol. 209, no. 1-2, August 1997 (1997-08-01), switzerland, pages 328 - 337, XP001165782
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