Title:
METHOD FOR MANUFACTURING FINE METAL MASK
Document Type and Number:
WIPO Patent Application WO/2023/182819
Kind Code:
A1
Abstract:
Disclosed is a method for manufacturing a fine metal mask, comprising the steps of: a) patterning and forming a plated resist on a substrate; b) forming a metal plated layer on the substrate exposed through the patterned plated resist; c) removing the patterned plated resist after step b); and d) separating the metal plated layer and the substrate, wherein, in step a) the plated resist has a cross-sectional shape formed in as a trapezoid.
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Inventors:
LEE SANG MIN (KR)
KWON YOUNG DUCK (KR)
YOO BYONG WOOK (KR)
KIM KI SOO (KR)
MOON JONG TAIK (KR)
MOON SEUNG IL (KR)
HYUN DA SOM (KR)
KWON YOUNG DUCK (KR)
YOO BYONG WOOK (KR)
KIM KI SOO (KR)
MOON JONG TAIK (KR)
MOON SEUNG IL (KR)
HYUN DA SOM (KR)
Application Number:
PCT/KR2023/003832
Publication Date:
September 28, 2023
Filing Date:
March 23, 2023
Export Citation:
Assignee:
GRAPHENELAB CO LTD (KR)
International Classes:
H10K71/16; H10K71/00
Foreign References:
| KR20210083697A | 2021-07-07 | |||
| KR20050120170A | 2005-12-22 | |||
| KR20200034832A | 2020-03-31 | |||
| KR20150119650A | 2015-10-26 | |||
| KR20180001666A | 2018-01-05 | |||
| KR102462723B1 | 2022-11-03 |
Attorney, Agent or Firm:
TAEDONG PATENT & LAW FIRM (KR)
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