METHOD FOR MANUFACTURING THREE-DIMENSIONAL STRUCTURE USING CONDUCTIVE FLOATING MASK

WIPO Patent Application WO/2023/140457

A1

The present invention may be configured to: apply, while maintaining a separation distance (d) between a substrate and a conductive mask, a different voltage to each of the substrate and the mask to form an electric field due to a potential difference; to make charged nanoparticles pass through a hole of the mask according to the intensity of the electric field to determine the degree to which the charged nanoparticles are focused on the substrate; and control the size and shape of a three-dimensional structure formed by depositing the nanoparticles on the substrate according to the focusing degree.

CHOI MANSOO (KR)
PETER V PIKHITSA (KR)
JUNG YOON-HO (KR)
SHIN JOOYEON (KR)
JUNG WOOIK (KR)
HUR CHANGNYEONG (KR)
CHO WONJIN (KR)

PCT/KR2022/013955

July 27, 2023

September 19, 2022

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GLOBAL FRONTIER CT MULTISCALE ENERGY SYSTEMS (KR)
SEOUL NAT UNIV R&DB FOUNDATION (KR)

B22F10/25; B22F12/30; B33Y10/00; B33Y30/00; B82B3/00

KR101391010B1	2014-04-30
JP2006278157A	2006-10-12
KR101222564B1	2013-01-16
JP2004207562A	2004-07-22

JUNG WOOIK; JUNG YOON-HO; PIKHITSA PETER V.; FENG JICHENG; YANG YOUNGHWAN; KIM MINKYUNG; TSAI HAO-YUAN; TANAKA TAKUO; SHIN JOOYEON: "Three-dimensional nanoprinting via charged aerosol jets", NATURE, NATURE PUBLISHING GROUP UK, LONDON, vol. 592, no. 7852, 31 March 2021 (2021-03-31), London, pages 54 - 59, XP037424438, ISSN: 0028-0836, DOI: 10.1038/s41586-021-03353-1

KIM, Aera (KR)

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