METHOD FOR PRODUCING COMPOSITE SUBSTRATE AND COMPOSITE SUBSTRATE

WIPO Patent Application WO/2011/158535

A1

In the disclosed method, a monocrystalline substrate group (10) of which each has a front surface and a rear surface is prepared. The monocrystalline substrate group (10) is disposed in a manner so that each of the front surfaces of the monocrystalline substrate group (10) is tilted with respect to the others. This disposition is performed in a manner so that the front surface of each of the monocrystalline substrate group (10) overall forms either a convex surface shape or a concave surface shape. The back surface of each of the monocrystalline substrate group (10) and a base substrate (30) are caused to be facing. The back surface of each of the monocrystalline substrate group (10) and the base substrate (30) are joined.

OKITA KYOKO (JP)
SASAKI MAKOTO (JP)
HARADA SHIN (JP)
NISHIGUCHI TARO (JP)
INOUE HIROKI (JP)
NAMIKAWA YASUO (JP)

PCT/JP2011/054338

December 22, 2011

February 25, 2011

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SUMITOMO ELECTRIC INDUSTRIES (JP)
OKITA KYOKO (JP)
SASAKI MAKOTO (JP)
HARADA SHIN (JP)
NISHIGUCHI TARO (JP)
INOUE HIROKI (JP)
NAMIKAWA YASUO (JP)

H01L21/02; H01L21/20; H01L21/336; H01L29/12; H01L29/78

JPH01184927A	1989-07-24
JPH0384919A	1991-04-10
JP2003257804A	2003-09-12
JPH1129397A	1999-02-02
JP2009252897A	2009-10-29
JPH098124A	1997-01-10
JPH09129528A	1997-05-16
JPH043908A	1992-01-08
JP2009302163A	2009-12-24
JP2009277944A	2009-11-26

Fukami Patent Office, p. c. (JP)
Patent business corporation Fukami patent firm (JP)

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