Title:
METHOD FOR PRODUCING MOLYBDENUM TARGET
Document Type and Number:
WIPO Patent Application WO/2012/043227
Kind Code:
A1
Abstract:
Provided is a method by which a low-oxygen and high-density molybdenum target can be efficiently obtained, while fully utilizing the characteristics of each molybdenum (Mo) starting material powder. The present invention provides a method for producing a molybdenum target, wherein a mixed powder that is obtained by mixing a molybdenum powder A, which is prepared by reducing molybdenum oxide and then crushing the resulting so as to have an average particle diameter of 2-15 μm, and a molybdenum powder B, which is prepared by crushing a molybdenum bulk starting material having a density of not less than 6.64 × 10 (kg/m3) so as to have an average particle diameter of 50-2,000 μm, is sintered under pressure.
Inventors:
SAITOH KAZUYA (JP)
HATA TOMOYUKI (JP)
KAMINADA MASASHI (JP)
TAKASHIMA HIROSHI (JP)
HATA TOMOYUKI (JP)
KAMINADA MASASHI (JP)
TAKASHIMA HIROSHI (JP)
Application Number:
PCT/JP2011/070943
Publication Date:
April 05, 2012
Filing Date:
September 14, 2011
Export Citation:
Assignee:
HITACHI METALS LTD (JP)
SAITOH KAZUYA (JP)
HATA TOMOYUKI (JP)
KAMINADA MASASHI (JP)
TAKASHIMA HIROSHI (JP)
SAITOH KAZUYA (JP)
HATA TOMOYUKI (JP)
KAMINADA MASASHI (JP)
TAKASHIMA HIROSHI (JP)
International Classes:
C23C14/34; B22F1/00; B22F3/14; B22F3/15; B22F9/04; B22F9/22
Foreign References:
| JP2008163467A | 2008-07-17 | |||
| JPH059509A | 1993-01-19 | |||
| JP2003064473A | 2003-03-05 | |||
| JP2006193826A | 2006-07-27 |
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Claims: