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Title:
METHOD AND SYSTEM FOR EXPOSING ALIGNMENT FILM FOR LIQUID CRYSTAL, AND LIQUID CRYSTAL PANEL MANUFACTURED USING SYSTEM FOR EXPOSING ALIGNMENT FILM FOR LIQUID CRYSTAL
Document Type and Number:
WIPO Patent Application WO/2012/132561
Kind Code:
A1
Abstract:
Provided are a method and a system for exposing an optical alignment film, whereby high-speed response of liquid crystal is made possible. In the system for exposing an alignment film for liquid crystal, said system being provided with a liquid crystal alignment film exposure apparatus and a substrate rotating means, the liquid crystal alignment film exposure apparatus is configured by being provided with: a stage means; a first exposure light irradiation means, which radiates, from the first tilted direction, first exposure light to a first predetermined region on a substrate; a second exposure light irradiation means, which radiates, from the second tilted direction, second exposure light to a second predetermined region on the substrate; a stage position measuring means, which measures the position of a stage; and a control means which controls, on the basis of the stage position information obtained by the measurement performed by the stage position measuring means, switching between turning on and turning off of the first exposure light irradiation performed by the first exposure light irradiation means, and the second exposure light irradiation performed by the second exposure light irradiation means.

Inventors:
YOSHITAKE YASUHIRO (JP)
KATAOKA FUMIO (JP)
NEMOTO RYOUJI (JP)
KAMAISHI TAKAO (JP)
UEHARA SATOSHI (JP)
HATAKEYAMA MICHIKO (JP)
Application Number:
PCT/JP2012/052874
Publication Date:
October 04, 2012
Filing Date:
February 08, 2012
Export Citation:
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Assignee:
HITACHI HIGH TECH CORP (JP)
YOSHITAKE YASUHIRO (JP)
KATAOKA FUMIO (JP)
NEMOTO RYOUJI (JP)
KAMAISHI TAKAO (JP)
UEHARA SATOSHI (JP)
HATAKEYAMA MICHIKO (JP)
International Classes:
G02F1/1337
Foreign References:
JP2000122302A2000-04-28
JPH11133429A1999-05-21
JPH05224205A1993-09-03
JP2001281669A2001-10-10
JPH10142608A1998-05-29
JP2010039492A2010-02-18
JP2012018256A2012-01-26
Attorney, Agent or Firm:
POLAIRE I. P. C. (JP)
Polaire Intellectual Property Corporation (JP)
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Claims: